Prof. Dr. rer. nat. Silvio Fuchs

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Faculty Engineering Sciences

Chair in Digital Optical Technologies

Prof. Dr. rer. nat. Silvio Fuchs

Fakultät Ingenieurwissenschaften

+49 3727 581054

silvio.fuchs@hs-mittweida.de

42-104

Visitor address

Schillerstr. 10

09648 Mittweida

42-104

Postal address

Mittweida University

Fakultät Ingenieurwissenschaften

Technikumplatz 17

09648 Mittweida

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Mittweida University of Applied Sciences is a forward-looking, cosmopolitan institution. Its teaching and research programmes are carried out through regional and national partnerships, as well as in collaboration with small and medium-sized enterprises in Saxony.

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On Sunday 20 September, the adh University Run will take place as part of International University Sports Day.

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The Mittweida University of Applied Sciences Students’ Council has a vacancy in the Events Department, to start on 1 October 2026.

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Collaboration between the university and the district administration: Ongoing social reporting highlights developments and supports the shaping of the future of social services.

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Projects and Publications

NanoDigitaX - Bildgebungsanlage im extrem ultravioletten Spektralbereich für die digitale, hochauflösende Inspektion von Halbleiter-Nanostrukturen

Term: 2025/10/15 – 2027/12/31
Financed by: Europäischer Fonds für Regionale Entwicklung (EFRE)
Funding code: 100757896
Project managers: Silvio Fuchs

J. Reinhard, F. Wiesner, M. Hennecke, T. Sidiropoulos, S. Kaleta, J. Späthe, J. Abel, M. Wünsche, G. Schmidl, J. Plentz, U. Hübner, K. Freiberg, J. Apell, S. Lippmann, M. Schnürer, S. Eisebitt, G. Paulus, S. Fuchs

Soft X-ray imaging with coherence tomography in the water window spectral range using high-harmonic generation

Appeared in: Light: Science & Applications 15 (2026), P. 79

DOI: 10.1038/s41377-025-02057-9

W. Eschen, R. Klas, D. Penagos Molina, S. Fuchs, G. Paulus, J. Limpert, J. Rothhardt

Coherent nanoscale imaging and chemical mapping with compact extreme ultraviolet and soft x-ray sources: Review and perspective

Appeared in: APL Photonics 10 (2025), No. 5

DOI: 10.1063/5.0254017

J. Abel, J. Apell, F. Wiesner, J. Reinhard, M. Wünsche, N. Felde, G. Schmidl, J. Plentz, G. Paulus, S. Lippmann, S. Fuchs

Non-destructive depth reconstruction of Al-Al2Cu layer structure with nanometer resolution using extreme ultraviolet coherence tomography

Appeared in: Materials Characterization 211 (2024), P. 113894

DOI: 10.1016/j.matchar.2024.113894

F. Wiesner, J. Abel, M. Hussain, V. Krishna, A. Cadore, J. Felipe, A. Valencia, M. Wünsche, J. Reinhard, M. Gruenewald, C. Cocchi, G. Paulus, G. Soavi, S. Fuchs

Optical Coherence Tomography of Van Der Waals Heterostructures Using Extreme Ultraviolet Light

Appeared in: Advanced Materials Interfaces, 2024

DOI: 10.1002/admi.202400534

J. Reinhard, S. Kaleta, J. Abel, F. Wiesner, M. Wünsche, E. Seemann, M. Westermann, T. Weber, J. Nathanael, A. Iliou, H. Fiedorowicz, F. Hillmann, C. Eggeling, G. Paulus, S. Fuchs

Laboratory-Based Correlative Soft X-ray and Fluorescence Microscopy in an Integrated Setup

Appeared in: Microscopy and Microanalysis, 2023

DOI: 10.1093/micmic/ozad123

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